Please use this identifier to cite or link to this item:
https://hdl.handle.net/10356/3042| Title: | Ion gun development/Ion beam etching and deposition system development | Authors: | Ahn, Jaeshin | Keywords: | DRNTU::Engineering::Electrical and electronic engineering | Issue Date: | 2000 | Abstract: | Development of ion gun and ion beam etching and deposition system. | URI: | http://hdl.handle.net/10356/3042 | Schools: | School of Electrical and Electronic Engineering | Rights: | Nanyang Technological University | Fulltext Permission: | restricted | Fulltext Availability: | With Fulltext |
| Appears in Collections: | EEE Research Reports (Staff & Graduate Students) |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| EEE-RESEARCH-REPORT_97.pdf Restricted Access | 1.17 MB | Adobe PDF | View/Open |
Page view(s) 50
648
Updated on May 7, 2025
Download(s)
7
Updated on May 7, 2025
Google ScholarTM
Check
Items in DR-NTU are protected by copyright, with all rights reserved, unless otherwise indicated.