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Title: Ion gun development/Ion beam etching and deposition system development
Authors: Ahn, Jaeshin
Keywords: DRNTU::Engineering::Electrical and electronic engineering
Issue Date: 2000
Abstract: Development of ion gun and ion beam etching and deposition system.
Rights: Nanyang Technological University
Fulltext Permission: restricted
Fulltext Availability: With Fulltext
Appears in Collections:EEE Research Reports (Staff & Graduate Students)

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