Please use this identifier to cite or link to this item: https://hdl.handle.net/10356/3044
Title: Demonstration lithography using plasma focus soft x-ray source
Authors: Lee, Sing
Wong, Terence Kin Shun
Feng, Xianping
Lee, Paul Choon Keat
Springham, Stuart V.
Serban, Adrian
Liu, Mahe
Kudryashov, Vladimir
Gribkov, Vladimir A.
Rajdeep Singh Rawat
Keywords: DRNTU::Engineering::Electrical and electronic engineering::Electronic packaging
Issue Date: 2000
Abstract: To demonstrate the soft x-ray source(SXR) developed and to gain experience in handling SXR masks and resists.
URI: http://hdl.handle.net/10356/3044
Rights: Nanyang Technological University
Fulltext Permission: restricted
Fulltext Availability: With Fulltext
Appears in Collections:EEE Research Reports (Staff & Graduate Students)

Files in This Item:
File Description SizeFormat 
EEE-RESEARCH-REPORT_99.pdf
  Restricted Access
14.97 MBAdobe PDFView/Open

Page view(s) 50

404
Updated on Dec 2, 2021

Download(s)

3
Updated on Dec 2, 2021

Google ScholarTM

Check

Items in DR-NTU are protected by copyright, with all rights reserved, unless otherwise indicated.