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Title: Demonstration lithography using plasma focus soft x-ray source
Authors: Lee, Sing
Wong, Terence Kin Shun
Feng, Xianping
Lee, Paul Choon Keat
Springham, Stuart V.
Serban, Adrian
Liu, Mahe
Kudryashov, Vladimir
Gribkov, Vladimir A.
Rajdeep Singh Rawat
Keywords: DRNTU::Engineering::Electrical and electronic engineering::Electronic packaging
Issue Date: 2000
Abstract: To demonstrate the soft x-ray source(SXR) developed and to gain experience in handling SXR masks and resists.
Rights: Nanyang Technological University
Fulltext Permission: restricted
Fulltext Availability: With Fulltext
Appears in Collections:EEE Research Reports (Staff & Graduate Students)

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