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|Title:||Characterisation of a diamond-like carbon deposition process||Authors:||Tan, Kian Hua.||Keywords:||DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials||Issue Date:||2002||Abstract:||Diamond-like carbon (DLC) films have attracted great interest in several applications in optical and tribological systems, and field emission displays due to its unique properties such as, high optical transparency in the infrared (IR) region, low electron affinity and high chemical inertness. In this project, DLC films have been deposited using the Electron Cyclotron Resonance Chemical Vapor Deposition (ECR-CVD) technique.||URI:||http://hdl.handle.net/10356/3370||Rights:||Nanyang Technological University||Fulltext Permission:||restricted||Fulltext Availability:||With Fulltext|
|Appears in Collections:||EEE Theses|
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