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Title: Characterisation of a diamond-like carbon deposition process
Authors: Tan, Kian Hua.
Keywords: DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials
Issue Date: 2002
Abstract: Diamond-like carbon (DLC) films have attracted great interest in several applications in optical and tribological systems, and field emission displays due to its unique properties such as, high optical transparency in the infrared (IR) region, low electron affinity and high chemical inertness. In this project, DLC films have been deposited using the Electron Cyclotron Resonance Chemical Vapor Deposition (ECR-CVD) technique.
Rights: Nanyang Technological University
Fulltext Permission: restricted
Fulltext Availability: With Fulltext
Appears in Collections:EEE Theses

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