dc.contributor.authorChao, Chenen_US
dc.date.accessioned2008-09-17T09:29:25Z
dc.date.accessioned2017-07-23T08:30:54Z
dc.date.available2008-09-17T09:29:25Z
dc.date.available2017-07-23T08:30:54Z
dc.date.copyright2006en_US
dc.date.issued2006
dc.identifier.citationChao, C. (2006). Piezoelectric films using hybrid technology for ultrasonic array and electronic device applications. Doctoral thesis, Nanyang Technological University, Singapore.
dc.identifier.urihttp://hdl.handle.net/10356/3404
dc.description.abstractLead zirconate titanate (PZT) films are promising for MEMS type micro-devices applications because of their high electromechanical coupling coefficients and excellent piezoelectric properties. PZT piezoelectric film integrated on silicon substrate for various MEMS devices has been the subject of considerable attention in recent years. In this thesis, a broad range of work is presented, including the deposition of PZT films onto silicon substrates, the development of a novel interferometric system and related method for piezoelectric characterization of PZT films, as well as the design and fabrication of diaphragm-type piezoelectric micromachined ultrasonic transducer arrays.en_US
dc.rightsNanyang Technological Universityen_US
dc.subjectDRNTU::Engineering::Electrical and electronic engineering::Electronic systems
dc.titlePiezoelectric films using hybrid technology for ultrasonic array and electronic device applicationsen_US
dc.typeThesisen_US
dc.contributor.schoolSchool of Electrical and Electronic Engineeringen_US
dc.contributor.supervisorZhu Weiguang (EEE)en_US
dc.description.degreeDOCTOR OF PHILOSOPHY (EEE)en_US


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