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Title: Implementing plasma induced damage rules in design
Authors: Tay, Hwee Chua.
Keywords: DRNTU::Engineering::Electrical and electronic engineering::Microelectronics
Issue Date: 2003
Abstract: This dissertation aims to help understand the principles of the plasma-induced damage mechanism and its measurement methods. It is organized into a few chapters to introduce to the readers on the fundamentals, measurements, experiment and findings of plasma-induced damage observe in the manufacturing line in IC industry.
Rights: Nanyang Technological University
Fulltext Permission: restricted
Fulltext Availability: With Fulltext
Appears in Collections:EEE Theses

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