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https://hdl.handle.net/10356/3434| Title: | Deposition and characterization of high-K (Ca,Sr)ZrO3 thin films using sol-gel technique | Authors: | Yu, Ting | Keywords: | DRNTU::Engineering::Electrical and electronic engineering::Electric apparatus and materials DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films |
Issue Date: | 2005 | Source: | Yu, T. (2005). Deposition and characterization of high-K (Ca,Sr)ZrO3 thin films using sol-gel technique. Doctoral thesis, Nanyang Technological University, Singapore. | Abstract: | There are growing interests in high-k dielectric materials because of their broad future applications for semiconductor industry such as alternative gate oxide, high-density storage capacitors, and high-voltage capacitors.The sol-gel derived CaxSr1-xZrO3 dielectric thin films have been systematically investigated for potential electronic device applications. | URI: | https://hdl.handle.net/10356/3434 | DOI: | 10.32657/10356/3434 | Rights: | Nanyang Technological University | Fulltext Permission: | open | Fulltext Availability: | With Fulltext |
| Appears in Collections: | EEE Theses |
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| File | Description | Size | Format | |
|---|---|---|---|---|
| EEE-THESES_1297.pdf | 2.89 MB | Adobe PDF |  View/Open |
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