Zinc oxide ultraviolet light-emitting devices : design and fabrication.

Abstract

In this thesis, filtered cathodic vacuum arc deposition technique has been demonstrated to fabricate Zinc Oxide ultraviolet optical devices on lattice-mismatched substrates, especially Silicon. These ZnO UV optical devices are divided into three different categories and they are 1) optical waveguides, 2) optically pumped lasers, and 3) light-emitting diodes.