Zinc oxide thin films nanostructures metal organic chemical vapor deposition
Tan, Swee Tiam
Date of Issue2007
School of Electrical and Electronic Engineering
In this dissertation, the investigation on growth and post-growth annealing treatment of ZnO thin films, deposited by a home-made metal organic chemical vapor deposition (MOCVD), is presented. The growth of the ZnO thin films was studied with various growth parameters and reactor designs. ZnO quantum dots embedded films, highly c-axis oriented ZnO films, p-type ZnO thin films and ZnO nanostructures were fabricated and investigated.
DRNTU::Engineering::Electrical and electronic engineering::Nanoelectronics
Nanyang Technological University