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Title: Zinc oxide thin films nanostructures metal organic chemical vapor deposition
Authors: Tan, Swee Tiam
Keywords: DRNTU::Engineering::Electrical and electronic engineering::Nanoelectronics
Issue Date: 2007
Source: Tan, S. T. (2007). Zinc oxide thin films nanostructures metal organic chemical vapor deposition. Doctoral thesis, Nanyang Technological University, Singapore.
Abstract: In this dissertation, the investigation on growth and post-growth annealing treatment of ZnO thin films, deposited by a home-made metal organic chemical vapor deposition (MOCVD), is presented. The growth of the ZnO thin films was studied with various growth parameters and reactor designs. ZnO quantum dots embedded films, highly c-axis oriented ZnO films, p-type ZnO thin films and ZnO nanostructures were fabricated and investigated.
DOI: 10.32657/10356/3516
Rights: Nanyang Technological University
Fulltext Permission: open
Fulltext Availability: With Fulltext
Appears in Collections:EEE Theses

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