Please use this identifier to cite or link to this item:
https://hdl.handle.net/10356/36038
Title: | Modeling and design of high sensitive PZT microsystems | Authors: | Uzair Ahmed | Keywords: | DRNTU::Engineering::Manufacturing::Product design | Issue Date: | 2007 | Abstract: | Design of microsystems involves knowledge of mechanical, electrical and material domains. To start with modeling and design of microsystems an analytical approach along with FEM is essential. For our objective we have carried out an analytical study of the tip deflection for piezoelectric micro-actuator, along with the design analysis using FEA commercial tool ANSYS®. We have observed the relation between sensitivity and tip deflection by introducing IDE (Inter Digitated Electrode) to induce in-plane piezoelectric effect. The comparative study between transverse and longitudinal mode has been conducted by considering the silicon thickness as the effective parameter. The simulated and analytical results show that the longitudinal mode is several times higher than the conventional transverse mode. In later part, we have also demonstrated the fabrication process of our device using MEMS design tool IntelliFab®. | Description: | 72 p. | URI: | http://hdl.handle.net/10356/36038 | Schools: | School of Mechanical and Aerospace Engineering | Fulltext Permission: | restricted | Fulltext Availability: | With Fulltext |
Appears in Collections: | MAE Theses |
Files in This Item:
File | Description | Size | Format | |
---|---|---|---|---|
MAE_THESES_159.pdf Restricted Access | 6.4 MB | Adobe PDF | View/Open |
Page view(s)
392
Updated on Mar 28, 2024
Download(s)
7
Updated on Mar 28, 2024
Google ScholarTM
Check
Items in DR-NTU are protected by copyright, with all rights reserved, unless otherwise indicated.