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Title: Deposition of site-specific metallic nanostructures with focused ion beam
Authors: Wang, Fang
Keywords: DRNTU::Engineering::Manufacturing
Issue Date: 2007
Abstract: Over the years small structures, as microscale or even nanoscale. have gained great focus and passion for recent and future technologies. But it is not easy to perform site-specific fabrication precisely using conventional process method. This project aims to explore use of focused ion beam (FIB), as a tool to deposit metallic nanodots and nanostructures at specific sites on substrates to modify device, make use of interconnections for integrated circuit application.
Description: 64 p.
Fulltext Permission: restricted
Fulltext Availability: With Fulltext
Appears in Collections:MAE Theses

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