Please use this identifier to cite or link to this item:
|Title:||Deposition of site-specific metallic nanostructures with focused ion beam||Authors:||Wang, Fang||Keywords:||DRNTU::Engineering::Manufacturing||Issue Date:||2007||Abstract:||Over the years small structures, as microscale or even nanoscale. have gained great focus and passion for recent and future technologies. But it is not easy to perform site-specific fabrication precisely using conventional process method. This project aims to explore use of focused ion beam (FIB), as a tool to deposit metallic nanodots and nanostructures at specific sites on substrates to modify device, make use of interconnections for integrated circuit application.||Description:||64 p.||URI:||http://hdl.handle.net/10356/36041||Fulltext Permission:||restricted||Fulltext Availability:||With Fulltext|
|Appears in Collections:||MAE Theses|
Items in DR-NTU are protected by copyright, with all rights reserved, unless otherwise indicated.