Please use this identifier to cite or link to this item: https://hdl.handle.net/10356/36128
Title: Development of silicon-on-glass electrostatic microactuators with a high aspect ratio and vertical configuration
Authors: Chen, Bangtao
Keywords: DRNTU::Engineering::Manufacturing::Product design
Issue Date: 2007
Source: Chen, B. (2007). Development of silicon-on-glass electrostatic microactuators with a high aspect ratio and vertical configuration. Doctoral thesis, Nanyang Technological University, Singapore.
Abstract: Actuators are the key components that produce the mechanical output and perform physical functions of particular systems. Electrostatic actuators are widely used in micro electromechanical systems (MEMS) applications for their combining versatility and simple technology. In this thesis, an electrostatic microactuator fabricated on silicon-on-glass (SOG) is studied.
Description: 261 p.
URI: https://hdl.handle.net/10356/36128
DOI: 10.32657/10356/36128
Fulltext Permission: open
Fulltext Availability: With Fulltext
Appears in Collections:MAE Theses

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