Development of silicon-on-glass electrostatic microactuators with a high aspect ratio and vertical configuration.
Date of Issue2007
School of Mechanical and Aerospace Engineering
Actuators are the key components that produce the mechanical output and perform physical functions of particular systems. Electrostatic actuators are widely used in micro electromechanical systems (MEMS) applications for their combining versatility and simple technology. In this thesis, an electrostatic microactuator fabricated on silicon-on-glass (SOG) is studied.