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https://hdl.handle.net/10356/36128
Title: | Development of silicon-on-glass electrostatic microactuators with a high aspect ratio and vertical configuration | Authors: | Chen, Bangtao | Keywords: | DRNTU::Engineering::Manufacturing::Product design | Issue Date: | 2007 | Source: | Chen, B. (2007). Development of silicon-on-glass electrostatic microactuators with a high aspect ratio and vertical configuration. Doctoral thesis, Nanyang Technological University, Singapore. | Abstract: | Actuators are the key components that produce the mechanical output and perform physical functions of particular systems. Electrostatic actuators are widely used in micro electromechanical systems (MEMS) applications for their combining versatility and simple technology. In this thesis, an electrostatic microactuator fabricated on silicon-on-glass (SOG) is studied. | Description: | 261 p. | URI: | https://hdl.handle.net/10356/36128 | DOI: | 10.32657/10356/36128 | Schools: | School of Mechanical and Aerospace Engineering | Fulltext Permission: | open | Fulltext Availability: | With Fulltext |
Appears in Collections: | MAE Theses |
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MAE_THESES_84.pdf | 34.26 MB | Adobe PDF | View/Open |
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