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Title: Design analysis and fabrication of a lateral MEMS microactuator
Authors: Chin, Chi Choong
Keywords: DRNTU::Engineering::Manufacturing::Product design
Issue Date: 2007
Source: Chin, C. C. (2007). Design analysis and fabrication of a lateral MEMS microactuator. Master’s thesis, Nanyang Technological University, Singapore.
Abstract: Radio-frequency microelectromechanical systems (RF MEMS) are highly miniaturized devices intended to switch, modulate, filter or tune electrical signals from DC to microwave frequencies. A novel lateral MEMS microactuator switch concept has been developed for RF switching purposes. The high-aspect ratio of the microactuator switch structure is designed and made possible through microfabrication via bulk micromachining; and is developed with thin-film deposition, silicon-glass wafer bonding and DRIE (deep reactive ion etching) technologies. The design has a 'push-pull' reciprocating actuation configuration with a lateral switchcontact structure, and is driven by electrostatic comb-drive actuators.
Description: 188 p.
DOI: 10.32657/10356/36132
Fulltext Permission: open
Fulltext Availability: With Fulltext
Appears in Collections:MAE Theses

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