Design analysis and fabrication of a lateral MEMS microactuator

Abstract

Radio-frequency microelectromechanical systems (RF MEMS) are highly miniaturized devices intended to switch, modulate, filter or tune electrical signals from DC to microwave frequencies. A novel lateral MEMS microactuator switch concept has been developed for RF switching purposes. The high-aspect ratio of the microactuator switch structure is designed and made possible through microfabrication via bulk micromachining; and is developed with thin-film deposition, silicon-glass wafer bonding and DRIE (deep reactive ion etching) technologies. The design has a 'push-pull' reciprocating actuation configuration with a lateral switchcontact structure, and is driven by electrostatic comb-drive actuators.