Please use this identifier to cite or link to this item:
|Title:||Design analysis and fabrication of a lateral MEMS microactuator||Authors:||Chin, Chi Choong||Keywords:||DRNTU::Engineering::Manufacturing::Product design||Issue Date:||2007||Source:||Chin, C. C. (2007). Design analysis and fabrication of a lateral MEMS microactuator. Master’s thesis, Nanyang Technological University, Singapore.||Abstract:||Radio-frequency microelectromechanical systems (RF MEMS) are highly miniaturized devices intended to switch, modulate, filter or tune electrical signals from DC to microwave frequencies. A novel lateral MEMS microactuator switch concept has been developed for RF switching purposes. The high-aspect ratio of the microactuator switch structure is designed and made possible through microfabrication via bulk micromachining; and is developed with thin-film deposition, silicon-glass wafer bonding and DRIE (deep reactive ion etching) technologies. The design has a 'push-pull' reciprocating actuation configuration with a lateral switchcontact structure, and is driven by electrostatic comb-drive actuators.||Description:||188 p.||URI:||https://hdl.handle.net/10356/36132||DOI:||10.32657/10356/36132||Fulltext Permission:||open||Fulltext Availability:||With Fulltext|
|Appears in Collections:||MAE Theses|
Items in DR-NTU are protected by copyright, with all rights reserved, unless otherwise indicated.