dc.contributor.authorChin, Chi Choongen_US
dc.date.accessioned2010-04-23T02:29:51Z
dc.date.accessioned2017-07-23T08:39:39Z
dc.date.available2010-04-23T02:29:51Z
dc.date.available2017-07-23T08:39:39Z
dc.date.copyright2007en_US
dc.date.issued2007
dc.identifier.citationChin, C. C. (2007). Design analysis and fabrication of a lateral MEMS microactuator. Master’s thesis, Nanyang Technological University, Singapore.
dc.identifier.urihttp://hdl.handle.net/10356/36132
dc.description188 p.en_US
dc.description.abstractRadio-frequency microelectromechanical systems (RF MEMS) are highly miniaturized devices intended to switch, modulate, filter or tune electrical signals from DC to microwave frequencies. A novel lateral MEMS microactuator switch concept has been developed for RF switching purposes. The high-aspect ratio of the microactuator switch structure is designed and made possible through microfabrication via bulk micromachining; and is developed with thin-film deposition, silicon-glass wafer bonding and DRIE (deep reactive ion etching) technologies. The design has a 'push-pull' reciprocating actuation configuration with a lateral switchcontact structure, and is driven by electrostatic comb-drive actuators.en_US
dc.subjectDRNTU::Engineering::Manufacturing::Product design
dc.titleDesign analysis and fabrication of a lateral MEMS microactuatoren_US
dc.typeThesisen_US
dc.contributor.schoolSchool of Mechanical and Aerospace Engineeringen_US
dc.contributor.supervisorMiao Jianmin
dc.contributor.supervisorXiao Zhongminen_US
dc.description.degreeMASTER OF ENGINEERING (MAE)en_US


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