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|Title:||Material characterization and device design of TiNx infrared microemitter||Authors:||Wang, Jun Min.||Keywords:||DRNTU::Engineering::Electrical and electronic engineering||Issue Date:||2004||Abstract:||This thesis systematically studies the electrical and thermal properties of TiN films deposited by the filtered arc deposition (FAD) method. The properties of deposited TiN films are analyzed by means of multiple characterization tools.||URI:||http://hdl.handle.net/10356/3668||Rights:||Nanyang Technological University||Fulltext Permission:||restricted||Fulltext Availability:||With Fulltext|
|Appears in Collections:||EEE Theses|
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