Please use this identifier to cite or link to this item: https://hdl.handle.net/10356/3668
Title: Material characterization and device design of TiNx infrared microemitter
Authors: Wang, Jun Min.
Keywords: DRNTU::Engineering::Electrical and electronic engineering
Issue Date: 2004
Abstract: This thesis systematically studies the electrical and thermal properties of TiN films deposited by the filtered arc deposition (FAD) method. The properties of deposited TiN films are analyzed by means of multiple characterization tools.
URI: http://hdl.handle.net/10356/3668
Rights: Nanyang Technological University
Fulltext Permission: restricted
Fulltext Availability: With Fulltext
Appears in Collections:EEE Theses

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