Please use this identifier to cite or link to this item:
Title: Simulation and development of triple-junction color sensors using CMOS-compatible processing
Authors: Chen, Jun
Keywords: DRNTU::Engineering::Electrical and electronic engineering::Electronic circuits
Issue Date: 2006
Source: Chen, J. (2006). Simulation and development of triple-junction color sensors using CMOS-compatible processing. Doctoral thesis, Nanyang Technological University, Singapore.
Abstract: Color sensor can be used to verify position of objects, recognize color sequence. Conventional color sensors employ three identical photodiodes with red, green, and blue optical filters deposited on their surface. This approach leads to an increased occupied silicon area. The color sensor with vertically stacked triple-junction structure (investigated in this thesis) can overcome these restrictions. The operation of the color sensor relies on the wavelength dependence of light absorption in silicon. The thorough design of the color sensor included more successive steps. Initially, theoretical calculations were performed to find the depth and depletion region width of each junction required to optimize their spectral responsivity. Once these main features were established, the doping concentrations for each junction were determined and the complete fabrication process was designed. Then TSUPREM-IV was used to simulate the whole process of the device; MEDICI was used to simulate the device optical and electrical characteristics. Afterwards, the mask layout, process run sheets based on two basic models: abrupt junction model and linearly graded junction model, were designed and confirmed. The practical fabrication of the color sensors has been carried out in MFL, using the modified 2?m CMOS process. Finally, the fabricated sensors have been characterized.
DOI: 10.32657/10356/3748
Rights: Nanyang Technological University
Fulltext Permission: open
Fulltext Availability: With Fulltext
Appears in Collections:EEE Theses

Files in This Item:
File Description SizeFormat 
EEE-THESES_158.pdf6.16 MBAdobe PDFThumbnail

Page view(s) 50

Updated on Oct 24, 2021

Download(s) 5

Updated on Oct 24, 2021

Google ScholarTM




Items in DR-NTU are protected by copyright, with all rights reserved, unless otherwise indicated.