Micro-lens fabrication on III-V semiconductor wafers

Abstract

Micro lenses have been used in a wide range of applications, including in optoelectronic device applications. For example, they can be integrated on top of VCSELs (Vertical Cavity Surface Emitting Lasers) to focus the emitting light from them. This eliminates the need for separate lenses, for which the alignment process is found to be very difficult.