Please use this identifier to cite or link to this item:
https://hdl.handle.net/10356/3882
Title: | Ferroelectric thin films using RF sputtering and SOL-GEL technology for electronic devices | Authors: | Chen, Xiaofeng. | Keywords: | DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films |
Issue Date: | 2001 | Abstract: | Ferroelectric thin films using RF sputtering and SOL-GEL technology for electronic devices. | URI: | http://hdl.handle.net/10356/3882 | Schools: | School of Electrical and Electronic Engineering | Rights: | Nanyang Technological University | Fulltext Permission: | restricted | Fulltext Availability: | With Fulltext |
Appears in Collections: | EEE Theses |
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File | Description | Size | Format | |
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EEE-THESES_170.pdf Restricted Access | 5.32 MB | Adobe PDF | View/Open |
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