dc.contributor.authorSze, Jia Yinen_US
dc.date.accessioned2010-05-21T04:39:08Z
dc.date.accessioned2017-07-23T08:32:49Z
dc.date.available2010-05-21T04:39:08Z
dc.date.available2017-07-23T08:32:49Z
dc.date.copyright2007en_US
dc.date.issued2007
dc.identifier.citationSze, J. Y. (2007). Plasma immersion ion implantation on polymers. Doctoral thesis, Nanyang Technological University, Singapore.
dc.identifier.urihttp://hdl.handle.net/10356/39058
dc.description158 p.en_US
dc.description.abstractThe focus of this thesis is to achieve plasma based surface modification of polymers. Highly ionized carbon plasma was generated from a filtered cathodic arc source in a vacuum chamber. The use of a highly negative pulse voltage applied on the substrate holder formed a plasma sheath around the substrate holder during the on-pulse. Ions were accelerated in the plasma sheath towards the polymer, thus creating the process: plasma immersion ion implantation (PHI). In this process, ions were implanted up to a depth of about 50 nm and with pulse voltages of between 3 kV and 12 kV. Ion-solids interactions provided both physical and chemical modifications to the modified layer.en_US
dc.subjectDRNTU::Engineering::Electrical and electronic engineeringen_US
dc.titlePlasma immersion ion implantation on polymersen_US
dc.typeThesisen_US
dc.contributor.schoolSchool of Electrical and Electronic Engineeringen_US
dc.contributor.supervisorTay Beng Kangen_US
dc.description.degreeDOCTOR OF PHILOSOPHY (EEE)en_US


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