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https://hdl.handle.net/10356/3909| Title: | Modeling and characterization of double bend filtered cathodic vacuum arc system | Authors: | You, Guo Feng | Keywords: | DRNTU::Engineering::Materials::Microelectronics and semiconductor materials | Issue Date: | 2002 | Abstract: | The Filtered Cathodic Vacuum Arc (FCVA) deposition technique has received extensive attention in recent years due to its unique feature. The arc is generated at one end of a toroidal solenoid filter, in which those ions and electrons in the arc follow the force line of the magnetic field and pass through, meanwhile those neutral particle moving in the straight lines are filtered away, | URI: | http://hdl.handle.net/10356/3909 | Schools: | School of Electrical and Electronic Engineering | Rights: | Nanyang Technological University | Fulltext Permission: | restricted | Fulltext Availability: | With Fulltext |
| Appears in Collections: | EEE Theses |
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| File | Description | Size | Format | |
|---|---|---|---|---|
| EEE-THESES_1724.pdf Restricted Access | 7.63 MB | Adobe PDF | View/Open |
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