Please use this identifier to cite or link to this item:
https://hdl.handle.net/10356/3909
Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | You, Guo Feng | en_US |
dc.date.accessioned | 2008-09-17T09:40:11Z | |
dc.date.available | 2008-09-17T09:40:11Z | |
dc.date.copyright | 2002 | en_US |
dc.date.issued | 2002 | |
dc.identifier.uri | http://hdl.handle.net/10356/3909 | |
dc.description.abstract | The Filtered Cathodic Vacuum Arc (FCVA) deposition technique has received extensive attention in recent years due to its unique feature. The arc is generated at one end of a toroidal solenoid filter, in which those ions and electrons in the arc follow the force line of the magnetic field and pass through, meanwhile those neutral particle moving in the straight lines are filtered away, | en_US |
dc.rights | Nanyang Technological University | en_US |
dc.subject | DRNTU::Engineering::Materials::Microelectronics and semiconductor materials | |
dc.title | Modeling and characterization of double bend filtered cathodic vacuum arc system | en_US |
dc.type | Thesis | en_US |
dc.contributor.supervisor | Tay, Beng Kang | en_US |
dc.contributor.school | School of Electrical and Electronic Engineering | en_US |
dc.description.degree | Master of Engineering | en_US |
item.fulltext | With Fulltext | - |
item.grantfulltext | restricted | - |
Appears in Collections: | EEE Theses |
Files in This Item:
File | Description | Size | Format | |
---|---|---|---|---|
EEE-THESES_1724.pdf Restricted Access | 7.63 MB | Adobe PDF | View/Open |
Page view(s)
409
Updated on Mar 28, 2024
Download(s)
4
Updated on Mar 28, 2024
Google ScholarTM
Check
Items in DR-NTU are protected by copyright, with all rights reserved, unless otherwise indicated.