Please use this identifier to cite or link to this item: https://hdl.handle.net/10356/3909
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dc.contributor.authorYou, Guo Fengen_US
dc.date.accessioned2008-09-17T09:40:11Z
dc.date.available2008-09-17T09:40:11Z
dc.date.copyright2002en_US
dc.date.issued2002
dc.identifier.urihttp://hdl.handle.net/10356/3909
dc.description.abstractThe Filtered Cathodic Vacuum Arc (FCVA) deposition technique has received extensive attention in recent years due to its unique feature. The arc is generated at one end of a toroidal solenoid filter, in which those ions and electrons in the arc follow the force line of the magnetic field and pass through, meanwhile those neutral particle moving in the straight lines are filtered away,en_US
dc.rightsNanyang Technological Universityen_US
dc.subjectDRNTU::Engineering::Materials::Microelectronics and semiconductor materials
dc.titleModeling and characterization of double bend filtered cathodic vacuum arc systemen_US
dc.typeThesisen_US
dc.contributor.supervisorTay, Beng Kangen_US
dc.contributor.schoolSchool of Electrical and Electronic Engineeringen_US
dc.description.degreeMaster of Engineeringen_US
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