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Title: Modeling and characterization of double bend filtered cathodic vacuum arc system
Authors: You, Guo Feng
Keywords: DRNTU::Engineering::Materials::Microelectronics and semiconductor materials
Issue Date: 2002
Abstract: The Filtered Cathodic Vacuum Arc (FCVA) deposition technique has received extensive attention in recent years due to its unique feature. The arc is generated at one end of a toroidal solenoid filter, in which those ions and electrons in the arc follow the force line of the magnetic field and pass through, meanwhile those neutral particle moving in the straight lines are filtered away,
Rights: Nanyang Technological University
Fulltext Permission: restricted
Fulltext Availability: With Fulltext
Appears in Collections:EEE Theses

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