Theory and experiment of MEMS tunable lasers

Abstract

This doctoral thesis focuses on the theoretical studies and experimental implementations of three types of tunable lasers using the microelectromechanical systems (MEMS) technology. A discretely tunable laser is first developed, including new theoretical models for the extremely short cavity and discrete wavelength tuning, and a MEMS prototype fabricated by deep etching on a silicon-on-insulator wafer. It can be tuned over 13.5 nm within 1 ms. Secondly, a continuously tunable laser is developed, including a modified theory and a fabricated MEMS laser. A continuous tuning range of 30.3 nm is obtained. Finally, an injection-locked laser subsystem is developed by integration of single MEMS laser components. A new generalized theory is established and a MEMS injection-locked laser is demonstrated. Locking states with a SMSR > 50 dB and all optical switching up to 50 MHz are achieved. In summary, the developed MEMS lasers exhibit many advantages such as small size, fast tuning speed, and high mechanical stability, and would find wide applications in optical communications, biomedical studies, and military defense.