Flicker noise fluctuations in deep submicron MOSFETs
Chew, Johnny Kok Wai
Date of Issue2007
School of Electrical and Electronic Engineering
This thesis investigates the effects of technology scaling on the flicker (or \lf) noise performance of deep submicron complementary metal-oxide-semiconductor (CMOS) transistors. Two major effects have been investigated, namely the employment of different gate dielectric growth and subsequent nitridation conditions, and the effects of geometry scaling. The first part of this work focus on the study of these two effects within the 0.25p.m technology node. Subsequently the scope of this study has been widened to examine the effects of scaling across a spectrum of technology nodes, namely 0.35um, 0.25um, 0.18pm and 0.13um. Finally the scope is further extended to cover the offering of different process flavours, as well as geometry scaling for the 0.13pm technology node.
DRNTU::Engineering::Electrical and electronic engineering::Semiconductors