dc.contributor.authorZhang, Pingen_US
dc.date.accessioned2008-09-17T09:42:00Z
dc.date.accessioned2017-07-23T08:31:32Z
dc.date.available2008-09-17T09:42:00Z
dc.date.available2017-07-23T08:31:32Z
dc.date.copyright2005en_US
dc.date.issued2005
dc.identifier.citationZhang, P. (2005). Fabrication and characterization of composite diamond like carbon films for some applications. Doctoral thesis, Nanyang Technological University, Singapore.
dc.identifier.urihttp://hdl.handle.net/10356/3991
dc.description.abstractThe filtered cathodic vacuum arc (FCVA) technique is powerful for thin film deposition. In this project, several sets of metal containing amorphous carbon (a-C:Me) films were successfully deposited, from metal/carbon composite targets, by using an FCVA system.en_US
dc.rightsNanyang Technological Universityen_US
dc.subjectDRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials
dc.subjectDRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
dc.titleFabrication and characterization of composite diamond like carbon films for some applicationsen_US
dc.typeThesisen_US
dc.contributor.schoolSchool of Electrical and Electronic Engineeringen_US
dc.contributor.supervisorTay Beng Kangen_US
dc.description.degreeDOCTOR OF PHILOSOPHY (EEE)en_US


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