Sensing interface for high-resolution accelerometers

Abstract

In this research, a new sensing interface together with different types of new amplification stages is designed, simulated, fabricated and tested. The proposed differential sensing interface circuit can reduce the number of the critical reference capacitors as well as the mismatching sensitivity in the capacitive sensor. In combination with chopper stabilization technique, the interface topology offers simplicity in canceling the offset and 1/f noise of the CMOS operational amplifier. The power consumption of the sensor system is only 859.6u,A.