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https://hdl.handle.net/10356/4021| Title: | Ferroelectric films for MEMS type devices using novel hybrid processing technology | Authors: | Zhao, Chang Lei | Keywords: | DRNTU::Engineering::Electrical and electronic engineering::Microelectromechanical systems | Issue Date: | 2005 | Source: | Zhao, C. L. (2005). Ferroelectric films for MEMS type devices using novel hybrid processing technology. Doctoral thesis, Nanyang Technological University, Singapore. | Abstract: | Lead zirconate titanate (PZT) films are promising for MEMS type micro- devices applications because of their extremely high electromechanical coupling coefficients and excellent piezoelectric response. PZT piezoelectric film integrated on silicon substrate has been the subject of considerable attention in recent years. This thesis has presented a broad range of work, which aimed at developing, characterizing and evaluating PZT ferroelectric thick films for MEMS type device applications that could be integrated with silicon micromachining. | URI: | https://hdl.handle.net/10356/4021 | DOI: | 10.32657/10356/4021 | Schools: | School of Electrical and Electronic Engineering | Rights: | Nanyang Technological University | Fulltext Permission: | open | Fulltext Availability: | With Fulltext |
| Appears in Collections: | EEE Theses |
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| File | Description | Size | Format | |
|---|---|---|---|---|
| EEE-THESES_1825.pdf | 21.77 MB | Adobe PDF |  View/Open |
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