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Title: Design and fabrication of an optical accelerometer using silicon micro-machining
Authors: Chiu, Man Ming.
Keywords: DRNTU::Engineering::Electrical and electronic engineering::Optics, optoelectronics, photonics
Issue Date: 2001
Abstract: The project is a feasibility study for a new type of accelerometer with photodiode as the displacement sensing device in combination with suspended flexure structure to form the new type of device, the surface micromachined optical accelerometer.
Rights: Nanyang Technological University
Fulltext Permission: restricted
Fulltext Availability: With Fulltext
Appears in Collections:EEE Theses

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