Please use this identifier to cite or link to this item:
https://hdl.handle.net/10356/4152| Title: | Fabrication of high aspect-ratio polysilicon microstructures for microsystem techonology applications | Authors: | Chong, Gang Yih. | Keywords: | DRNTU::Engineering::Electrical and electronic engineering::Microelectronics | Issue Date: | 2002 | Abstract: | A novel fabrication technology for high aspect-ratio polysilicon (HARP) microstructures was developed for the fabrication of inertial sensors such as accelerometer or gyroscope. | URI: | http://hdl.handle.net/10356/4152 | Schools: | School of Electrical and Electronic Engineering | Rights: | Nanyang Technological University | Fulltext Permission: | restricted | Fulltext Availability: | With Fulltext |
| Appears in Collections: | EEE Theses |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| EEE-THESES_215.pdf Restricted Access | 17.54 MB | Adobe PDF | View/Open |
Page view(s) 50
646
Updated on May 7, 2025
Download(s)
8
Updated on May 7, 2025
Google ScholarTM
Check
Items in DR-NTU are protected by copyright, with all rights reserved, unless otherwise indicated.