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Title: Fabrication of high aspect-ratio polysilicon microstructures for microsystem techonology applications
Authors: Chong, Gang Yih.
Keywords: DRNTU::Engineering::Electrical and electronic engineering::Microelectronics
Issue Date: 2002
Abstract: A novel fabrication technology for high aspect-ratio polysilicon (HARP) microstructures was developed for the fabrication of inertial sensors such as accelerometer or gyroscope.
Rights: Nanyang Technological University
Fulltext Permission: restricted
Fulltext Availability: With Fulltext
Appears in Collections:EEE Theses

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