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|Title:||Development of in situ monitoring for micro-electrical discharge machining||Authors:||Willy Kurnia||Keywords:||DRNTU::Engineering::Electrical and electronic engineering::Microelectronics||Issue Date:||2008||Source:||Willy, K. (2008). Development of in situ monitoring for micro-electrical discharge machining. Master’s thesis, Nanyang Technological University, Singapore.||Abstract:||With rapid technology advancement, the need for micro product is rapidly increasing in microeletronics, medical, automotive and telecommunication industries. Micro-Electrical Discharge Machine (EDM), the adaptation of conventional EDM, is an interesting way to realize micromachining process for the fabrication of three-dimensional complex microcomponents and microstructures from metallic and semiconductor substrate.||URI:||https://hdl.handle.net/10356/41569||DOI:||10.32657/10356/41569||Fulltext Permission:||open||Fulltext Availability:||With Fulltext|
|Appears in Collections:||MAE Theses|
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