Development of in situ monitoring for micro-electrical discharge machining.
Date of Issue2008
School of Mechanical and Aerospace Engineering
With rapid technology advancement, the need for micro product is rapidly increasing in microeletronics, medical, automotive and telecommunication industries. Micro-Electrical Discharge Machine (EDM), the adaptation of conventional EDM, is an interesting way to realize micromachining process for the fabrication of three-dimensional complex microcomponents and microstructures from metallic and semiconductor substrate.
DRNTU::Engineering::Electrical and electronic engineering::Microelectronics