Please use this identifier to cite or link to this item: https://hdl.handle.net/10356/41569
Title: Development of in situ monitoring for micro-electrical discharge machining
Authors: Willy Kurnia
Keywords: DRNTU::Engineering::Electrical and electronic engineering::Microelectronics
Issue Date: 2008
Source: Willy, K. (2008). Development of in situ monitoring for micro-electrical discharge machining. Master’s thesis, Nanyang Technological University, Singapore.
Abstract: With rapid technology advancement, the need for micro product is rapidly increasing in microeletronics, medical, automotive and telecommunication industries. Micro-Electrical Discharge Machine (EDM), the adaptation of conventional EDM, is an interesting way to realize micromachining process for the fabrication of three-dimensional complex microcomponents and microstructures from metallic and semiconductor substrate.
URI: https://hdl.handle.net/10356/41569
DOI: 10.32657/10356/41569
Fulltext Permission: open
Fulltext Availability: With Fulltext
Appears in Collections:MAE Theses

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