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Title: Plasma induced quantum well intermixing for photonic integration
Authors: Hery Susanto Djie
Keywords: DRNTU::Engineering::Electrical and electronic engineering::Optics, optoelectronics, photonics
Issue Date: 2005
Source: Hery, S. D. (2005). Plasma induced quantum well intermixing for photonic integration. Doctoral thesis, Nanyang Technological University, Singapore.
Abstract: In this thesis, Ar plasma induced intermixing has been developed with various plasma systems, including Inductively Coupled Plasma (ICP) machine. A plasma induced QWI technique has been demonstrated to successfully tune a wide range of III-V compound semiconductor materials for photonic integration applications.
DOI: 10.32657/10356/4350
Rights: Nanyang Technological University
Fulltext Permission: open
Fulltext Availability: With Fulltext
Appears in Collections:EEE Theses

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