Please use this identifier to cite or link to this item: https://hdl.handle.net/10356/44566
Title: Studies of optical properties of silicon-rich silicon nitride thin films
Authors: Cen, Zhanhong
Keywords: DRNTU::Engineering::Electrical and electronic engineering::Optics, optoelectronics, photonics
Issue Date: 2011
Abstract: Silicon-rich silicon nitride (SRN) thin films were synthesized by either Si ion implantation into silicon nitride films or plasma enhanced chemical vapor deposition (PECVD). Si nanoparticles embedded in the silicon nitride matrix are precipitated by the excess Si atoms. Optical properties of the Si nanoparticles embedded in the silicon nitride matrix have been investigated with spectroscopic ellipsometry. Strong light emissions from different SRN films under optical pumping (i.e., photoluminescence or PL) or electrical pumping (i.e., electroluminescence or EL) have been observed. The PL properties and mechanisms have been studied. Strong visible EL with electrically-tunable colors and even white color from the light-emitting structures based on the SRN films has been demonstrated. The EL properties and their dependence on the synthesis conditions of the SNR films have been investigated. In addition, it is found that the charge trapping in SRN films strongly influences the EL properties.
URI: http://hdl.handle.net/10356/44566
Fulltext Permission: restricted
Fulltext Availability: With Fulltext
Appears in Collections:EEE Theses

Files in This Item:
File Description SizeFormat 
TeG0600878L.pdf
  Restricted Access
3.99 MBAdobe PDFView/Open

Page view(s) 50

246
checked on Sep 28, 2020

Download(s) 50

16
checked on Sep 28, 2020

Google ScholarTM

Check

Items in DR-NTU are protected by copyright, with all rights reserved, unless otherwise indicated.