Please use this identifier to cite or link to this item: https://hdl.handle.net/10356/44973
Title: Silicon nanowire characterization for fatigue and reliability
Authors: Yim, Wai Tat.
Keywords: DRNTU::Engineering::Materials::Material testing and characterization
Issue Date: 2011
Abstract: This final year project report mainly focus on a project that is in conjunction with A*STAR Institute of Microelectronics in performing a study on the silicon nanowire characterization for fatigue and reliability. The project encompass a background research on relevant mechanical and reliability experimental methods for MEMS pressure sensors. The preparation of the experiment samples and most importantly the series of experimental setups that are vitally essential. Also not forgetting to the series of characterization experiments conducted to evaluate the reliability of the pressure sensors. The pressure sensor samples fabricated were embedded with P-type silicon nanowire and <110> oriented. The nanowires were fabricated by employing complementary metal oxide semiconductor (CMOS) compatible process. A series of characterization experiments namely bulge testing, fracture and fatigue testing were conducted in A*STAR Institute of Microelectronics and significant results were obtained. However due to time constraints, improvements to the experiments had been proposed to further facilitate the near future works.
URI: http://hdl.handle.net/10356/44973
Rights: Nanyang Technological University
Fulltext Permission: restricted
Fulltext Availability: With Fulltext
Appears in Collections:MAE Student Reports (FYP/IA/PA/PI)

Files in This Item:
File Description SizeFormat 
M109.pdf
  Restricted Access
2.44 MBAdobe PDFView/Open

Google ScholarTM

Check

Items in DR-NTU are protected by copyright, with all rights reserved, unless otherwise indicated.