Please use this identifier to cite or link to this item:
Title: Study of elasto-polymer for supercritical CO2 wafer processing
Authors: Kyaw, Aung.
Keywords: DRNTU::Engineering::Electrical and electronic engineering::Electronic packaging
Issue Date: 2005
Abstract: Carbon dioxide (CO2) is one of the most common candidates of Supercritical Fluids (SCFs). It has a number of advantages, such as low human toxicity, no solvent waste, low cost, ready availability, complete recovery of extracted agents and extracted substances, environmental acceptability, complete and ready recycling, etc. It has been widely studied as a cleaning solvent for many decades to replace large amounts of toxic chemicals and as replacement of water in semiconductor processes in recent year.
Rights: Nanyang Technological University
Fulltext Permission: restricted
Fulltext Availability: With Fulltext
Appears in Collections:EEE Theses

Files in This Item:
File Description SizeFormat 
  Restricted Access
20.45 MBAdobe PDFView/Open

Page view(s) 20

checked on Oct 25, 2020

Download(s) 20

checked on Oct 25, 2020

Google ScholarTM


Items in DR-NTU are protected by copyright, with all rights reserved, unless otherwise indicated.