Please use this identifier to cite or link to this item: https://hdl.handle.net/10356/4553
Title: Process integration issues in the development of 0.18um 1.8v LP SRAM using local interconnect
Authors: Lal, Manni
Keywords: DRNTU::Engineering::Electrical and electronic engineering::Microelectronics
Issue Date: 2002
Abstract: This dissertation presents the development issues encountered during the present development of 0.18um LP (low-power) SRAM in Chartered Semiconductor Manufacturing Lid. All integration issues are explained with data and cross-sectional scanning electron micrographs for better explanation
URI: http://hdl.handle.net/10356/4553
Rights: Nanyang Technological University
Fulltext Permission: restricted
Fulltext Availability: With Fulltext
Appears in Collections:EEE Theses

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