Please use this identifier to cite or link to this item:
Title: Process integration issues in the development of 0.18um 1.8v LP SRAM using local interconnect
Authors: Lal, Manni
Keywords: DRNTU::Engineering::Electrical and electronic engineering::Microelectronics
Issue Date: 2002
Abstract: This dissertation presents the development issues encountered during the present development of 0.18um LP (low-power) SRAM in Chartered Semiconductor Manufacturing Lid. All integration issues are explained with data and cross-sectional scanning electron micrographs for better explanation
Rights: Nanyang Technological University
Fulltext Permission: restricted
Fulltext Availability: With Fulltext
Appears in Collections:EEE Theses

Files in This Item:
File Description SizeFormat 
  Restricted Access
13.06 MBAdobe PDFView/Open

Page view(s) 50

Updated on Apr 14, 2021


Updated on Apr 14, 2021

Google ScholarTM


Items in DR-NTU are protected by copyright, with all rights reserved, unless otherwise indicated.