Fabrication and characterization of piezoresistive pressure sensor arrays packaged using liquid crystal polymer (Lcp) and Polydimethylsiloxane (Pdms) for underwater applications

Abstract

Liquid crystal polymer (LCP) is a thermoplastic polymer made of aligned molecule chains with crystal-like spatial regularity. Because of their aligned molecule chain structure, LCP has unique properties; excellent high frequency dielectric properties, extremely low moisture absorption and high hermetic property. Due to these three unique properties LCP was selected as the package and substrate materials for the underwater pressure sensor array.