Please use this identifier to cite or link to this item: https://hdl.handle.net/10356/4606
Title: SECS/GEM message discovery for rapid equipment integration
Authors: Liang, Zhiqian
Keywords: DRNTU::Engineering::Electrical and electronic engineering::Semiconductors
DRNTU::Engineering::Manufacturing
Issue Date: 2007
Source: Liang, Z. (2007). SECS/GEM message discovery for rapid equipment integration. Master’s thesis, Nanyang Technological University, Singapore.
Abstract: This project aims to analyze and suggest a solution to alleviate the problem of slow and tedious equiment integration process in the semiconductor manufacturing industries.
URI: https://hdl.handle.net/10356/4606
DOI: 10.32657/10356/4606
Rights: Nanyang Technological University
Fulltext Permission: open
Fulltext Availability: With Fulltext
Appears in Collections:EEE Theses

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