Please use this identifier to cite or link to this item:
https://hdl.handle.net/10356/4606| Title: | SECS/GEM message discovery for rapid equipment integration | Authors: | Liang, Zhiqian | Keywords: | DRNTU::Engineering::Electrical and electronic engineering::Semiconductors DRNTU::Engineering::Manufacturing |
Issue Date: | 2007 | Source: | Liang, Z. (2007). SECS/GEM message discovery for rapid equipment integration. Master’s thesis, Nanyang Technological University, Singapore. | Abstract: | This project aims to analyze and suggest a solution to alleviate the problem of slow and tedious equiment integration process in the semiconductor manufacturing industries. | URI: | https://hdl.handle.net/10356/4606 | DOI: | 10.32657/10356/4606 | Schools: | School of Electrical and Electronic Engineering | Rights: | Nanyang Technological University | Fulltext Permission: | open | Fulltext Availability: | With Fulltext |
| Appears in Collections: | EEE Theses |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| EEE-THESES_623.pdf | 941.59 kB | Adobe PDF |  View/Open |
Page view(s) 20
724
Updated on Mar 16, 2025
Download(s) 1
2,462
Updated on Mar 16, 2025
Google ScholarTM
Check
Altmetric
Items in DR-NTU are protected by copyright, with all rights reserved, unless otherwise indicated.