Please use this identifier to cite or link to this item: https://hdl.handle.net/10356/4606
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dc.contributor.authorLiang, Zhiqianen
dc.date.accessioned2008-09-17T09:55:12Zen
dc.date.available2008-09-17T09:55:12Zen
dc.date.copyright2007en
dc.date.issued2007en
dc.identifier.citationLiang, Z. (2007). SECS/GEM message discovery for rapid equipment integration. Master’s thesis, Nanyang Technological University, Singapore.en
dc.identifier.urihttps://hdl.handle.net/10356/4606en
dc.description.abstractThis project aims to analyze and suggest a solution to alleviate the problem of slow and tedious equiment integration process in the semiconductor manufacturing industries.en
dc.rightsNanyang Technological Universityen
dc.subjectDRNTU::Engineering::Electrical and electronic engineering::Semiconductorsen
dc.subjectDRNTU::Engineering::Manufacturingen
dc.titleSECS/GEM message discovery for rapid equipment integrationen
dc.typeThesisen
dc.contributor.supervisorAnton Aendenroomeren
dc.contributor.schoolSchool of Electrical and Electronic Engineeringen
dc.description.degreeMASTER OF ENGINEERING (EEE)en
dc.identifier.doi10.32657/10356/4606en
item.grantfulltextopen-
item.fulltextWith Fulltext-
Appears in Collections:EEE Theses
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