Please use this identifier to cite or link to this item: https://hdl.handle.net/10356/46232
Title: A theoretical and experimental study of the viscous damping effect for diaphragm-based MEMS application
Authors: Tan, Chee Wee
Keywords: DRNTU::Engineering::Mechanical engineering
Issue Date: 2011
Source: Tan, C. W. (2011). A theoretical and experimental study of the viscous damping effect for diaphragm-based MEMS application. Doctoral thesis, Nanyang Technological University, Singapore.
Abstract: In the analysis and design of microelectromechanical system (MEMS) devices, volume and surface forces are two physical quantities that are commonly encountered. During miniaturization, equal reduction of both the volume and the surface of a microstructure is not normally achievable. A 10% reduction in length results in the surface area. Therefore, the surface force effect of viscous damping has a more significant influence on the mechanical performance of MEMS devices such as frequency response characteristics, mechanical- thermal noise and switching speed.
URI: https://hdl.handle.net/10356/46232
DOI: 10.32657/10356/46232
Fulltext Permission: open
Fulltext Availability: With Fulltext
Appears in Collections:MAE Theses

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