Please use this identifier to cite or link to this item: https://hdl.handle.net/10356/46232
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dc.contributor.authorTan, Chee Weeen
dc.date.accessioned2011-07-08T03:10:51Zen
dc.date.available2011-07-08T03:10:51Zen
dc.date.copyright2011en
dc.date.issued2011en
dc.identifier.citationTan, C. W. (2011). A theoretical and experimental study of the viscous damping effect for diaphragm-based MEMS application. Doctoral thesis, Nanyang Technological University, Singapore.en
dc.identifier.urihttps://hdl.handle.net/10356/46232en
dc.description.abstractIn the analysis and design of microelectromechanical system (MEMS) devices, volume and surface forces are two physical quantities that are commonly encountered. During miniaturization, equal reduction of both the volume and the surface of a microstructure is not normally achievable. A 10% reduction in length results in the surface area. Therefore, the surface force effect of viscous damping has a more significant influence on the mechanical performance of MEMS devices such as frequency response characteristics, mechanical- thermal noise and switching speed.en
dc.format.extent184 p.en
dc.language.isoenen
dc.subjectDRNTU::Engineering::Mechanical engineeringen
dc.titleA theoretical and experimental study of the viscous damping effect for diaphragm-based MEMS applicationen
dc.typeThesisen
dc.contributor.supervisorMiao Jianminen
dc.contributor.schoolSchool of Mechanical and Aerospace Engineeringen
dc.description.degreeDOCTOR OF PHILOSOPHY (MAE)en
dc.identifier.doi10.32657/10356/46232en
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Appears in Collections:MAE Theses
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