dc.contributor.authorTan, Chee Wee
dc.date.accessioned2011-07-08T03:10:51Z
dc.date.accessioned2017-07-23T08:40:00Z
dc.date.available2011-07-08T03:10:51Z
dc.date.available2017-07-23T08:40:00Z
dc.date.copyright2011en_US
dc.date.issued2011
dc.identifier.citationTan, C. W. (2011). A theoretical and experimental study of the viscous damping effect for diaphragm-based MEMS application. Doctoral thesis, Nanyang Technological University, Singapore.
dc.identifier.urihttp://hdl.handle.net/10356/46232
dc.description.abstractIn the analysis and design of microelectromechanical system (MEMS) devices, volume and surface forces are two physical quantities that are commonly encountered. During miniaturization, equal reduction of both the volume and the surface of a microstructure is not normally achievable. A 10% reduction in length results in the surface area. Therefore, the surface force effect of viscous damping has a more significant influence on the mechanical performance of MEMS devices such as frequency response characteristics, mechanical- thermal noise and switching speed.en_US
dc.format.extent184 p.en_US
dc.language.isoenen_US
dc.subjectDRNTU::Engineering::Mechanical engineeringen_US
dc.titleA theoretical and experimental study of the viscous damping effect for diaphragm-based MEMS applicationen_US
dc.typeThesis
dc.contributor.schoolSchool of Mechanical and Aerospace Engineeringen_US
dc.contributor.supervisorMiao Jianminen_US
dc.description.degreeDOCTOR OF PHILOSOPHY (MAE)en_US


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