Design and fabrication of MEMS optical switches
Date of Issue2006
School of Electrical and Electronic Engineering
This thesis focuses on the research related to the microelectromechanical systems (MEMS) optical switch consisting of three major areas, micromahined actuator, deep reactive ion etching (DRIE) fabrication, and total internal reflection (TIR) optical switch.
DRNTU::Engineering::Electrical and electronic engineering::Optics, optoelectronics, photonics
Nanyang Technological University