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Title: Design and fabrication of MEMS optical switches
Authors: Li, Jing
Keywords: DRNTU::Engineering::Electrical and electronic engineering::Optics, optoelectronics, photonics
Issue Date: 2006
Source: Li, J. (2006). Design and fabrication of MEMS optical switches. Doctoral thesis, Nanyang Technological University, Singapore.
Abstract: This thesis focuses on the research related to the microelectromechanical systems (MEMS) optical switch consisting of three major areas, micromahined actuator, deep reactive ion etching (DRIE) fabrication, and total internal reflection (TIR) optical switch.
DOI: 10.32657/10356/4640
Rights: Nanyang Technological University
Fulltext Permission: open
Fulltext Availability: With Fulltext
Appears in Collections:EEE Theses

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