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|Title:||Design and fabrication of MEMS optical switches||Authors:||Li, Jing.||Keywords:||DRNTU::Engineering::Electrical and electronic engineering::Optics, optoelectronics, photonics||Issue Date:||2006||Source:||Li, J. (2006). Design and fabrication of MEMS optical switches. Doctoral thesis, Nanyang Technological University, Singapore.||Abstract:||This thesis focuses on the research related to the microelectromechanical systems (MEMS) optical switch consisting of three major areas, micromahined actuator, deep reactive ion etching (DRIE) fabrication, and total internal reflection (TIR) optical switch.||URI:||http://hdl.handle.net/10356/4640||Rights:||Nanyang Technological University||Fulltext Permission:||open||Fulltext Availability:||With Fulltext|
|Appears in Collections:||EEE Theses|
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