dc.contributor.authorLi, Jingen_US
dc.date.accessioned2008-09-17T09:55:48Z
dc.date.accessioned2017-07-23T08:31:55Z
dc.date.available2008-09-17T09:55:48Z
dc.date.available2017-07-23T08:31:55Z
dc.date.copyright2006en_US
dc.date.issued2006
dc.identifier.citationLi, J. (2006). Design and fabrication of MEMS optical switches. Doctoral thesis, Nanyang Technological University, Singapore.
dc.identifier.urihttp://hdl.handle.net/10356/4640
dc.description.abstractThis thesis focuses on the research related to the microelectromechanical systems (MEMS) optical switch consisting of three major areas, micromahined actuator, deep reactive ion etching (DRIE) fabrication, and total internal reflection (TIR) optical switch.en_US
dc.rightsNanyang Technological Universityen_US
dc.subjectDRNTU::Engineering::Electrical and electronic engineering::Optics, optoelectronics, photonics
dc.titleDesign and fabrication of MEMS optical switchesen_US
dc.typeThesisen_US
dc.contributor.schoolSchool of Electrical and Electronic Engineeringen_US
dc.contributor.supervisorLiu, Ai Qunen_US
dc.description.degreeDOCTOR OF PHILOSOPHY (EEE)en_US
dc.identifier.doihttps://doi.org/10.32657/10356/4640


Files in this item

FilesSizeFormatView
EEE-THESES_654.pdf16.43Mbapplication/pdfView/Open

This item appears in the following Collection(s)

Show simple item record