Nano-structured materials using ICP-CVD nanotechnology process

Abstract

Nanostructured materials are anticipated to revolutionize the various technological fields with their unique novel properties. The research on metal oxides gas sensors has benefited from the materials at nano-scale with their better sensing performance than the conventional bulk materials. Currently, the novel synthesis of quasi one-dimensional (1-D) nanostructures, the various strategies to improve the selectivity and the design for manufacturability of the nanostructures are the three directions pursued by the researchers in this field.