Flexure-based electromagnetic parallel-kinematics manipulator system
Teo, Tat Joo
Date of Issue2009
School of Mechanical and Aerospace Engineering
Manipulation between the nano and meso scales at elevated bandwidth with large continuous output force remains as a technological gap in the field of ultra-high precision manipulation over the past decades. Current ultra-high precision manipulators are incompetent of bridging this gap due to their failure in recognizing the inter-dependency between each subsystem, e.g., the positioning mechanisms, the nano-positioning actuators and the control systems etc. This research focuses on the development of a multiple degrees-of-freedom Flexure-Based Electromagnetic Parallel-Kinematics Manipulator (FEPM) targeted with several capabilities, i.e., nanometric resolution, large continuous output force, fast actuating speed, high system stiffness and a large workspace of a few millimeters and degrees, so as to bridge the existing technological gap. Each subsystem is investigated with the inter-dependency between these subsystems being taken into consideration. Consequently, these subsystems are treated as one unified mechatronics system with a common goal, i.e., to realize those targeted capabilities.
Nanyang Technological University