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|Title:||Flexure-based electromagnetic parallel-kinematics manipulator system||Authors:||Teo, Tat Joo.||Keywords:||DRNTU::Engineering::Mechanical engineering||Issue Date:||2009||Source:||Teo, T. J. (2009). Flexure-based electromagnetic parallel-kinematics manipulator system. Doctoral thesis, Nanyang Technological University, Singapore.||Abstract:||Manipulation between the nano and meso scales at elevated bandwidth with large continuous output force remains as a technological gap in the field of ultra-high precision manipulation over the past decades. Current ultra-high precision manipulators are incompetent of bridging this gap due to their failure in recognizing the inter-dependency between each subsystem, e.g., the positioning mechanisms, the nano-positioning actuators and the control systems etc. This research focuses on the development of a multiple degrees-of-freedom Flexure-Based Electromagnetic Parallel-Kinematics Manipulator (FEPM) targeted with several capabilities, i.e., nanometric resolution, large continuous output force, fast actuating speed, high system stiffness and a large workspace of a few millimeters and degrees, so as to bridge the existing technological gap. Each subsystem is investigated with the inter-dependency between these subsystems being taken into consideration. Consequently, these subsystems are treated as one unified mechatronics system with a common goal, i.e., to realize those targeted capabilities.||Description:||286 p.||URI:||http://hdl.handle.net/10356/47141||Rights:||Nanyang Technological University||Fulltext Permission:||open||Fulltext Availability:||With Fulltext|
|Appears in Collections:||MAE Theses|
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