Improved microfabrication process for polymeric thermal actuator

Abstract

A polymeric thermal actuator generates motion by thermal expansion upon resistive heating. It typically consists of a metal heater deposited on a polymeric expander layer. Embedding heat conductor, like silicon, to the polymer actuator can improve thermal response time and provide structural reinforcement. However, micro-fabrication of such polymeric composite actuator is challenging. In this thesis, we report micro-fabrication of a polymeric composite thermal actuator, with embedded silicon skeleton. We also present improved micro-fabrication methods in producing the polymeric composite thermal actuator.