Surface metrology and optical properties of thin film shape memory alloys
Date of Issue2009
School of Mechanical and Aerospace Engineering
Shape memory alloys (SMA) have many interesting characteristics induced by the phase transformation upon thermal cycling or mechanical loading/unloading. In recent years, with the development of Micro-Electro-Mechanical-System (MEMS), NiTi SMA thin films have received more attention due to their high work output per unit volume, good biocompatibility and durability. These properties enable NiTi SMA thin films to be widely considered as a good candidate for powerful microactuators. Upon the austenite —> twined martensite transformation, the significant surface morphology change (i.e. surface relief) reveals another potential feature for optical micro-devices.
Nanyang Technological University