Reliable and high speed RF MEMS switches with wafer-scale encapsulation.
Date of Issue2009
School of Mechanical and Aerospace Engineering
The tremendously fast expansion of wireless and satellite communication systems in the information age is without parallel in history, leading to increase in the demand for miniaturized communication systems with smaller sizes, lighter weights, better functionalities and higher reliabilities. RF MEMS are widely recognized as enabling technologies for the miniaturization due to their promising characteristics of broadband operation, low power consumption and insertion loss, high isolation, and excellent signal linearity. In the past decade, RF MEMS switches are receiving much more attention for communication systems including tuneable matching networks, phase shifters, resonators, and reconfigurable filters. Nevertheless, challenges remain for the RF switches, restricting their applications in many systems. Reliability, packaging, switching speed, and power handling are among the common challenges shared by MEMS switches.
Nanyang Technological University