Layer-by-layer synthesis of titanium oxide nano structure

Abstract

With extensive applications of titanium dioxide (TiO2) nanostructures in various fields such as in solar cell devices, sensors, etc, deposition of TiO2 ultra-thin film with thickness control to nanometers becomes very important. Layer-by-Layer sol gel deposition (LBLSG), as a solution-based deposition method, is simple, quick and inexpensive technique to achieve this purpose[l]. It has the strong potential for the nanostructure fabrication such as Ti02 nanopatterns[2] and nanotubes arrays[3], etc. In this report, some basic properties of LBLSG deposition process of TiO2 thin film will be comprehensively studied including factors such as moisture, acid catalysts affecting the deposition regarding deposition rate, film morphology, and composition.